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L1 Chemistry basics

This course will familiarize you with Chemistry basics, pH, and calculations.
It is a prerequisite for all fumehoods, wet-benches, spin-coater, and RCD8 training.

Guarantor: Jiří Zita

L1 Lithography basics

This Level 1 course teaches the basic knowledge needed in consequent, more advanced courses aimed at specific lithography processes.
The aim of this course is to give you an overview of all common lithography techniques used in micro- and nanofabrication, their basic principles, advantages and disadvantages, and their main application areas.
After finishing this course, you should know the most common terminology used in nanolithography and be able to select the appropriate lithography technique for your application.

Guarantor: Michal Urbánek

L1 Plasma technology basics

This course will introduce you to the world of plasma.
It is a prerequisite for all plasma instruments - DRIE, RIE, etc.

This course is under construction.

Guarantor: Marek Eliáš

L1 Vacuum technology basics

Guarantor: Marek Eliáš

L2 Cleaning processes

This course will familiarize you with the Cleaning processes, like RCA1 and RCA2. Also, you will learn how to prepare basic cleaning solutions like Piranha or Aqua Regia. It is a prerequisite for Etching fumehoods.

Guarantor: Jiří Zita

L2 Deposition techniques

This is a Level 2 course teaching basic knowledge needed in consequent, more advanced courses aimed at specific thin film deposition instruments.
The aim of this course is to give you an overview of all common thin film deposition techniques used in micro- and nanofabrication, their basic principles, advantages and disadvantages, and their main application areas.
After finishing this course, you should know the most common terminology used in thin film deposition techniques nanolithography, and you should be able to select the appropriate deposition technique for your application.

Guarantor: Jan Prášek

L2 Dry etching for MEMS structure

This course aims to provide an overview of the basic theoretical knowledge in dry etching, which is used to create Micro-Electro-Mechanical Systems (MEMS ). You will learn about the principles of etching, basic terminology, types of plasmas used for etching, differences between dry and wet etching, etc.

Guarantor: Marek Eliáš

L2 Working with lithography chemicals

This Level 2 course teaches how to handle lithographic chemicals.
It contains a list of positive and negative resists for EBL and DWL, recommended developers, solvents, and removers/strippers.
You will learn how to develop a resist, and what glassware and fumehood you should use.

Guarantor: Radim Hrdý

L2 Preventing contamination - CVD lab

This Level 2 course teaches the basics about How to prevent contamination in CVD lab.
It contains a list of allowed materials and recommended procedures to minimize possible contamination of instruments and samples

Guarantor: Marek Eliáš

L2 Preventing contamination - PVD lab

This Level 2 course teaches the basics about How to prevent contamination in PVD lab.
It contains a list of allowed materials and recommended procedures to minimize possible contamination of instruments and samples

Guarantor: Jan Prášek