It is a prerequisite for all fumehoods, wet-benches, spin-coater, and RCD8 training.
Guarantor: Jiří Zita
The aim of this course is to give you an overview of all common lithography techniques used in micro- and nanofabrication, their basic principles, advantages and disadvantages, and their main application areas.
After finishing this course, you should know the most common terminology used in nanolithography and be able to select the appropriate lithography technique for your application.
Guarantor: Michal Urbánek
It is a prerequisite for all plasma instruments - DRIE, RIE, etc.
This course is under construction.
Guarantor: Marek Eliáš
Guarantor: Jiří Zita
This is a Level 2 course teaching basic knowledge needed in consequent, more advanced courses aimed at specific thin film deposition instruments.
The aim of this course is to give you an overview of all common thin film deposition techniques used in micro- and nanofabrication, their basic principles, advantages and disadvantages, and their main application areas.
After finishing this course, you should know the most common terminology used in thin film deposition techniques nanolithography, and you should be able to select the appropriate deposition technique for your application.
Guarantor: Jan Prášek
This course is under construction.
Guarantor: Marek Eliáš
This course is under construction.
Guarantor: Radim Hrdý
Guarantor: Jan Prášek
- Teacher: Marek Eliáš
- Teacher: Jan Prášek
- Teacher: Michal Urbánek