Banner NanoFab

This course will familiarize you with Chemistry basics, pH, and calculations.
It is a prerequisite for all fumehoods, wet-benches, spin-coater, and RCD8 training.

Guarantor: Jiří Zita


This Level 1 course teaches the basic knowledge needed in consequent, more advanced courses aimed at specific lithography processes.
The aim of this course is to give you an overview of all common lithography techniques used in micro- and nanofabrication, their basic principles, advantages and disadvantages, and their main application areas.
After finishing this course, you should know the most common terminology used in nanolithography and be able to select the appropriate lithography technique for your application.

Guarantor: Michal Urbánek
This course will introduce you to the world of plasma.
It is a prerequisite for all plasma instruments - DRIE, RIE, etc.

This course is under construction.

Guarantor: Marek Eliáš


This course will familiarize you with the Cleaning processes, like RCA1 and RCA2. Also, you will learn how to prepare basic cleaning solutions like Piranha or Aqua Regia. It is a prerequisite for Etching fumehoods.

Guarantor: Jiří Zita


This is a Level 2 course teaching basic knowledge needed in consequent, more advanced courses aimed at specific thin film deposition instruments.
The aim of this course is to give you an overview of all common thin film deposition techniques used in micro- and nanofabrication, their basic principles, advantages and disadvantages, and their main application areas.
After finishing this course, you should know the most common terminology used in thin film deposition techniques nanolithography, and you should be able to select the appropriate deposition technique for your application.

Guarantor: Jan Prášek



This course is under construction.

Guarantor: Marek Eliáš



This course is under construction.

Guarantor: Radim Hrdý