This course will familiarize you with Chemistry basics, pH, and calculations.
It is a prerequisite for all fumehoods, wet-benches, spin-coater, and RCD8 training.
It is a prerequisite for all fumehoods, wet-benches, spin-coater, and RCD8 training.
Guarantor: Jiří Zita
This Level 1 course teaches the basic knowledge needed in consequent, more advanced courses aimed at specific lithography processes.
The aim of this course is to give you an overview of all common lithography techniques used in micro- and nanofabrication, their basic principles, advantages and disadvantages, and their main application areas.
After finishing this course, you should know the most common terminology used in nanolithography and be able to select the appropriate lithography technique for your application.
Guarantor: Michal Urbánek
The aim of this course is to give you an overview of all common lithography techniques used in micro- and nanofabrication, their basic principles, advantages and disadvantages, and their main application areas.
After finishing this course, you should know the most common terminology used in nanolithography and be able to select the appropriate lithography technique for your application.
Guarantor: Michal Urbánek
This course will introduce you to the world of plasma.
It is a prerequisite for all plasma instruments - DRIE, RIE, etc.
It is a prerequisite for all plasma instruments - DRIE, RIE, etc.
This course is under construction.
Guarantor: Marek Eliáš
This course will familiarize you with the Cleaning processes, like RCA1 and RCA2. Also, you will learn how to prepare basic cleaning solutions like Piranha or Aqua Regia.
It is a prerequisite for Etching fumehoods.
Guarantor: Jiří Zita
This is a Level 2 course teaching basic knowledge needed in consequent, more advanced courses aimed at specific thin film deposition instruments.
The aim of this course is to give you an overview of all common thin film deposition techniques used in micro- and nanofabrication, their basic principles, advantages and disadvantages, and their main application areas.
After finishing this course, you should know the most common terminology used in thin film deposition techniques nanolithography, and you should be able to select the appropriate deposition technique for your application.
Guarantor: Jan Prášek
This course is under construction.
Guarantor: Marek Eliáš
This Level 2 course teaches how to handle lithographic chemicals.
It contains a list of positive and negative resists for EBL and DWL, recommended developers, solvents, and removers/strippers.
You will learn how to develop a resist, and what glassware and fumehood you should use.
It contains a list of positive and negative resists for EBL and DWL, recommended developers, solvents, and removers/strippers.
You will learn how to develop a resist, and what glassware and fumehood you should use.
Guarantor: Radim Hrdý
This Level 2 course teaches the basics about How to prevent contamination in CVD lab.
It contains a list of allowed materials and recommended procedures to minimize possible contamination of instruments and samples
Guarantor: Marek Eliáš
It contains a list of allowed materials and recommended procedures to minimize possible contamination of instruments and samples
Guarantor: Marek Eliáš
This Level 2 course teaches the basics about How to prevent contamination in PVD lab.
It contains a list of allowed materials and recommended procedures to minimize possible contamination of instruments and samples
Guarantor: Jan Prášek
It contains a list of allowed materials and recommended procedures to minimize possible contamination of instruments and samples
Guarantor: Jan Prášek